New insights into TDDB in FinFET based on strain analysis at the atomistic scale

Zuoyuan Dong, Zixuan Sun, Lan Li, Zirui Wang, Changqing Ye, Yu Yao, Jialu Huang, Xiaomei Li Xing Wu*, Runsheng Wang*
New insights into TDDB in FinFET based on strain analysis at the atomistic scale
IRPS 2025