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The Nanoscale Electrical Damage Mechanism of Ge₂Sb₂Te₅ Phase-Change Films Discovered by Conductive Atomic Force Microscopy

2024-09-27

    Xu X, Li M, Li S, Cui A, Deng M, Jiang K, Zhu L, Shang L, Chu J H, Hu Z
    The Nanoscale Electrical Damage Mechanism of Ge₂Sb₂Te₅ Phase-Change Films Discovered by Conductive Atomic Force Microscopy
    IEEE Electron Device Letters, 2023, 44: 488-491.

    | 标签: 传感器