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Ferroelectricity of pristine Hf0. 5Zr0. 5O2 films fabricated by atomic layer deposition

2024-09-29

    Chen L, Zhang X, Feng G, Liu Y, Hao S, Zhu Q, Feng X, Qu K, Yang Z, Qi Y, Ivry Y, Dkhil B, Tian B, Chu J H, Duan C
    Ferroelectricity of pristine Hf0. 5Zr0. 5O2 films fabricated by atomic layer deposition
    Chinese Physics B, 2023, 32: 108102.

    | 标签: 传感器