In Situ Localization Techniques of Defects in Advanced Semiconductor Devices from Macro-scale to Atomistic-scale

Jialu Huang, Jingming Zhou, Zuoyuan Dong, Runsheng Wang*, Junhao Chu*, Xing Wu*
In Situ Localization Techniques of Defects in Advanced Semiconductor Devices from Macro-scale to Atomistic-scale
ICSICT 2024